- Multi-zone temperature control (low temp).
• Deposition - Vacuum, gas
flow, and pressure control.
• Etching - Chemical composition,
pH, and flow control.
• CMP - Slurry flow and pressure
• RTP - High-speed temp control.
• ALD - low and vapor delivery.
• Motion - High-speed adaptive
& accurate motion control.
MFA to replace PID and eliminate manual tuning.
MFA to control nonlinear
MFA to control multivariable
MFA to control processes
with large time delays.
MFA to deal with measurable
pH to control pH processes.
• High yield
achieved by fast and accurate control to reach
• Fast time-to-market for
new product R&D since no process models are
• Lower operating costs
and longer up time by eliminating controller manual
• Efficient use of tools
due to minimal calibration and conditioning.
• Best "cost of ownership"
achieved when embedding MFA in your tools.