| Operating
Unit / Process |
What
to Control |
Why
Is It Difficult |
Which
MFA to Use |
Rapid thermal processing equipment (RTP)
Request
white paper |
Zone temperatures |
High-speed nonlinear multivariable |
High-speed Nonlinear MFA + Feedforward MFA |
Chemical Mechanical
Polishing (CMP)
Request
white paper |
Slurry flow |
Nonlinear |
Nonlinear MFA |
| Pressure loops |
Nonlinear multivariable |
Nonlinear + Feedforward MFA |
Deposition systems
Request
white paper |
Gas flow |
Nonlinear multivariable |
Nonlinear + Feedforward MFA |
| Vacuum pressure |
Nonlinear multivariable |
Nonlinear MFA |
| Proto-typing of apparatus
and equipment |
Temp, pressure, flow, motion control |
Frequent changes of proto-type design result in system
dynamic changes |
Mixed MFAs |
Wastewater treatment
Application
Sheet
|
pH Control |
Large gain changes in Log scale, large delay time |
MFA pH or Anti-delay MFA pH |
| Chemical concentration of
wet-bath |
pH Control |
High accuracy pH control |
MFA pH or Anti-delay MFA pH |
