• Furnace
- Multi-zone temperature control (low temp).
• Deposition - Vacuum, gas
flow, and pressure control.
• Etching - Chemical composition,
pH, and flow control.
• CMP - Slurry flow and pressure
control.
• RTP - High-speed temp control.
• ALD - low and vapor delivery.
• Motion - High-speed adaptive
& accurate motion control. |
• SISO
MFA to replace PID and eliminate manual tuning.
• Nonlinear
MFA to control nonlinear
processes.
• MIMO
MFA to control multivariable
systems.
• Anti-delay
MFA to control processes
with large time delays.
• Feedforward
MFA to deal with measurable
disturbances.
• MFA
pH to control pH processes.
|
• High yield
achieved by fast and accurate control to reach
setpoint.
• Fast time-to-market for
new product R&D since no process models are
required.
• Lower operating costs
and longer up time by eliminating controller manual
tuning.
• Efficient use of tools
due to minimal calibration and conditioning.
• Best "cost of ownership"
achieved when embedding MFA in your tools.
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